Semiconductor device methods of manufacture

ABSTRACT

A semiconductor device includes a vapor chamber lid for high power applications such as chip-on-wafer-on-substrate (CoWoS) applications using high performance processors (e.g., graphics processing unit (GPU)) and methods of manufacturing the same. The vapor chamber lid provides a thermal solution which enhances the thermal performance of a package with multiple chips. The vapor chamber lid improves hot spot dissipation in high performance chips, for example, at the three-dimensional (3D-IC) packaging level.

PRIORITY CLAIM AND CROSS-REFERENCE

This application claims the benefit of U.S. Provisional Application No.62/687,112, filed on Jun. 19, 2018, which application is herebyincorporated herein by reference.

BACKGROUND

A typical problem with three-dimensional integrated circuits is heatdissipation during operation. A prolonged exposure of a die by operatingat excessive temperatures may decrease the reliability and operatinglifetime of the die. This problem may become severe if the die is acomputing die such as a central processing unit (CPU), which generates alot of heat. As such, improvements to heat transfer are still needed.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1A illustrates a semiconductor device comprising a 3D-IC packageincluding a vapor chamber lid (VC-Lid) in accordance with an embodiment.

FIG. 1B illustrates a detailed view of a cross-section taken through acenter of the vapor chamber lid (VC-Lid) according to some embodimentsand FIG. 1B further illustrates a general functional flow of the VC-Lidduring operation, in accordance with an embodiment.

FIG. 2 illustrates a semiconductor device comprising a heat sink coupledto the VC-Lid of the 3D-IC package in accordance with an embodiment.

FIG. 3 illustrates a semiconductor device comprising a vapor chamber(VC) heat sink (VC-HS) coupled to the VC-Lid of the 3D-IC package inaccordance with an embodiment.

FIG. 4 illustrates a semiconductor device comprising a conductive sheetcoupled to the VC-Lid of the 3D-IC package in accordance with anembodiment.

FIG. 5 illustrates a semiconductor device comprising a 3D-IC packageincluding a VC-Lid in accordance with another embodiment.

FIG. 6 illustrates a semiconductor device comprising the VC heat sinkand the 3D-IC package without the VC-Lid, the VC heat sink being coupledto a 3D-IC module of the semiconductor device in accordance to anembodiment.

FIGS. 7-8 illustrate an integrated InFO oS vapor chamber lid inaccordance with some embodiments.

FIGS. 9-10 illustrate a system on wafer package with an integratedsystem on wafer vapor chamber lid in accordance with some embodiments.

FIGS. 11-12 illustrate system on wafer packages with thermal interfacematerial interspersed with adhesive materials in accordance with someembodiments.

FIG. 13 illustrates a system on wafer package with a vapor chamber heatsink in accordance with some embodiments.

Corresponding numerals and symbols in the different figures generallyrefer to corresponding parts unless otherwise indicated. The figures aredrawn to clearly illustrate the relevant aspects of the embodiments andare not necessarily drawn to scale. Furthermore, dashed outlines depictregions where a layer or a component of the package is beneath or behindanother layer or component.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the invention. Specificexamples of components and arrangements are described below to simplifythe present disclosure. These are, of course, merely examples and arenot intended to be limiting. For example, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures may be formed between the first and second features, such thatthe first and second features may not be in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Three-dimensional integrated circuits (3D-ICs) offer many solutions toreducing physical sizes of packaged components and allowing for agreater number of components to be placed in a given chip area. Onesolution that 3D-IC components offer is to stack dies on top of oneanother and interconnect or route them through connections such asthrough-silicon vias (TSVs). Some of the benefits of 3D-IC, for example,include exhibiting a smaller footprint, reducing power consumption byreducing the lengths of signal interconnects, and improving yield andfabrication cost if individual dies are tested separately prior toassembly. One challenge with 3D-IC components is dealing with heatdissipation and managing thermal hotspots during operation.

Embodiments described herein relate to a semiconductor device includinga vapor chamber lid (VC-Lid) for high power applications such aschip-on-wafer-on-substrate (CoWoS) applications using high performanceprocessors (e.g., graphics processing unit (GPU)) and methods ofmanufacturing the same. In an embodiment, a thermal solution enhancesthe CoWoS thermal performance of a package with multiple chips. In anembodiment, heat dissipation is improved in 3D-IC packaging includinghigh performance multiple chip stacking techniques with high powerdensities of the stacked chips being between about 50 W/cm² and about300 W/cm², and hot spot dissipation may be achieved in high performancechip packages including, for example, at the three-dimensionalintegrated circuit package (3D-IC PKG) level.

In some embodiments, an increase in lid thermal spreading effects, and areduction of package thermal resistance, may be achieved in varioustechnologies (e.g., VC-Lid on chip-on-wafer (CoW), VC-Lid with copper(Cu)-Sheet, Embedded VC-Lid). Designs of some embodiments may beadaptive and provide for easy implementation that is compatible withother existing thermal solution supply chains.

With reference now to FIG. 1A, this figure illustrates a semiconductordevice 100 that comprises a 3D-IC PKG substrate 103, which is bonded toa first side of a 3D-IC module 105. The 3D-IC PKG substrate 103 may becoupled both electrically and physically to another substrate on a sideof the 3D-IC PKG substrate 103 opposite the 3D-IC module 105. Anothersubstrate may provide a structural base and an electrical interface fromthe 3D-IC PKG substrate 103 and/or the 3D-IC module 105 to other devicesand systems. In some embodiments, the 3D-IC PKG substrate 103 may bebonded to another substrate, such as, a printed circuit board that worksto interconnect various electrical components to each other in order toprovide a desired functionality for a user. In other embodiments, the3D-IC PKG substrate 103 may be bonded to another substrate, such as, aredistribution layer that comprises multiple conductive layers, some ofwhich are inter-layers within the other substrate. In some embodiments,the 3D-IC PKG substrate 103 may be bonded to another substrate, such as,a substrate including electrical elements, such as resistors,capacitors, signal distribution circuitry, combinations of these, or thelike. These electrical elements may be active, passive, or a combinationthereof. In other embodiments, the 3D-IC PKG substrate 103 may be bondedto a substrate that is free from both active and passive electricalelements therein. All such combinations are fully intended to beincluded within the scope of the embodiments.

In an embodiment the 3D-IC PKG substrate 103 may be a mother substrateand may comprise a first semiconductor die such as a logicdie/interposer that comprises a number of structures such as a substrateformed from a variety of semiconductor substrate materials such assilicon (Si), silicon carbide (SiC), gallium arsenide (GaAs), galliumnitride (GaN), or the like. A combination of active and/or passivedevices, such as transistors, diodes, resistors, capacitors, and thelike, may be formed as part of the 3D-IC PKG substrate 103 to constructfunctional circuitries. In addition, alternating layers of conductivematerials (such as copper, aluminum, alloys, doped polysilicon,combinations thereof, or the like) may be utilized between layers ofdielectric material to form interconnections between the active andpassive devices and also to provide access to external connections ofthe 3D-IC PKG substrate 103. Through substrate vias (TSVs) may also beformed in order to provide electrical connectivity from one side of the3D-IC PKG substrate 103 to another side of the 3D-IC PKG substrate 103.In an embodiment, the 3D-IC PKG substrate 103 has a height H₁₀₃ ofbetween about 1 mm and about 3 mm, such as about 1.8 mm and a width W₁₀₃of between about 30 mm and about 100 mm, such as about 60 mm.

In an embodiment the 3D-IC PKG substrate 103 may be bonded to anothersubstrate using external connections, which may be, e.g., solder balls.External connections of the 3D-IC PKG substrate 103 may provideelectrical and thermal connections between the 3D-IC PKG substrate 103and the substrate to which the 3D-IC PKG substrate 103 is bonded.However, other methods of electrically and physically attaching the3D-IC PKG substrate 103 to another substrate, such as C4 bumps,micro-bumps, pillars, columns, or other structures formed from aconductive material such as solder, metal, or metal alloy, may beutilized to facilitate electrical, physical, and thermal connectivitybetween the 3D-IC PKG substrate 103 and the substrate to which the 3D-ICPKG substrate 103 is bonded.

The 3D-IC module 105 may comprise semiconductor stacked dies such asmemory, flash, converter, sensor, logic die, interposer and so on thatcan work in conjunction with the 3D-IC PKG substrate 103 in order toprovide a desired functionality to the user. In a particular embodimentthe 3D-IC module 105 may be considered a daughter substrate (to the3D-IC PKG substrate's 103 mother substrate) and comprises a number ofstructures such as an interposer 107 formed from a variety ofsemiconductor substrate materials such as silicon (Si), silicon carbide(SiC), gallium arsenide (GaAs), gallium nitride (GaN), or the like. Acombination of active and/or passive devices, such as transistors,diodes, resistors, capacitors, and the like, may be formed as part ofthe interposer 107 to construct functional circuitries. In addition, theinterposer 107 may include a series of alternating layers of conductivematerials (such as copper, aluminum, alloys, doped polysilicon,combinations thereof, or the like) may be utilized between layers ofdielectric material to form interconnections between the active andpassive devices and also to provide access to module externalconnections 109 (e.g., external connections of a 3D-IC module).

In an embodiment the 3D-IC module 105 is bonded to the 3D-IC PKGsubstrate 103 using the module external connections 109, which may be,e.g., solder balls. The module external connections 109 provideelectrical and thermal connections between the 3D-IC module 105 and the3D-IC PKG substrate 103. However, other methods of electrically andphysically attaching the 3D-IC module 105 to the 3D-IC PKG substrate103, such as C4 bumps, micro-bumps, pillars, columns, or otherstructures formed from a conductive material such as solder, metal, ormetal alloy, may be utilized to facilitate electrical, physical, andthermal connectivity between the 3D-IC module 105 and the 3D-IC PKGsubstrate 103.

In some embodiments, the 3D-IC module 105 may comprise a plurality ofhigh performance semiconductor dies such as may be used in theprocessing of 3D smart internet TV graphics or other processing intenseapplications. As illustrated in FIG. 1A, the 3D-IC module 105 mayinclude a 3D-IC processor 115 (e.g., CPU, graphics processing unit(GPU)), and 3D-IC memory dies 117 (e.g., high bandwidth memory (HBM),memory cubes, memory stacks, or the like) that are separated by anencapsulate 125. In an embodiment, the 3D-IC processor 115 is coupled tothe interposer 107 via a 3D-IC logic interface 119 bonded to the 3D-ICprocessor 115 by way of chip side interface bonds 123. In addition, the3D-IC logic interface 119 may include a series of alternating layers ofconductive materials (such as copper, aluminum, alloys, dopedpolysilicon, combinations thereof, or the like) to form interconnectionsbetween the memory dies 117 and the 3D-IC processor 115 and to provideaccess to the 3D-IC logic interface 119. The plurality of semiconductordies of the 3D-IC module 105 may be bonded to the interposer 107 via aplurality of surface side contacts 121. In an embodiment, the surfaceside contacts 121 may be microbumps.

FIG. 1A also illustrates the application of first thermal interfacematerial (TIM) 111 to a top surface of the 3D-IC PKG substrate 103 andthe application of second thermal interface material (TIM) 113 to a topsurface of the 3D-IC module 105. In an embodiment the first thermalinterface material 111 may be a viscous, silicone compound similar tothe mechanical properties of a grease or a gel. The first thermalinterface material 111 is used to improve electrical and/or thermalconduction by filling in microscopic air pockets created betweenminutely uneven surfaces, such as the region between surfaces of the3D-IC PKG substrate 103 and overlying materials; the first thermalinterface 111 may also have a thermal conductivity (i.e., “k value”) inWatts per meter-Kelvin (W/mK) of between about 1 W/mK and about 10 W/mK,such as about 4 W/mK, for example.

In some embodiments the first thermal interface material 111 is ametal-based thermal paste containing silver, nickel, or aluminumparticles suspended in the silicone grease. In other embodimentsnon-electrically conductive, ceramic-based pastes, filled with ceramicpowders such as beryllium oxide, aluminum nitride, aluminum oxide, orzinc oxide, may be applied. In other embodiments, instead of being apaste with a consistency similar to gels or greases, the first thermalinterface material 111 may, instead be a solid material. In thisembodiment the first thermal interface material 111 may be a thin sheetof a thermally conductive, solid material. In a particular embodimentthe first thermal interface material 111 that is solid may be a thinsheet of indium, nickel, silver, aluminum, combinations and alloys ofthese, or the like, or other thermally conductive solid material. Anysuitably thermally conductive material may also be utilized, and allsuch materials are fully intended to be included within the scope of theembodiments.

The first thermal interface material 111 is injected or placed on the3D-IC PKG substrate 103 around but laterally separated from the 3D-ICmodule 105. In an embodiment the first thermal interface material 111has a first thickness T₁₁₁ of between about 20 μm and about 200 μm, suchas about 60 μm. However, any other suitable thickness may also be used.Additionally, the first thermal interface material 111 may be spacedfrom the 3D-IC module 105 by a first distance D₁ of between about 2 mmand about 20 mm, such as about 2.5 mm.

The second thermal interface material 113 may be applied to a surface ofthe VC-Lid 131 or a top surface of the 3D-IC module 105 in order toprovide a thermal interface between the 3D-IC module 105 and theoverlying VC-Lid 131. In an embodiment the second thermal interfacematerial 113 may be similar to the first thermal interface material 111and may be applied at the same time as the first thermal interfacematerial 111, although the second thermal interface material 113 mayalso be different from the first thermal interface material 111. In anembodiment the second thermal interface material 113 may be applied ineither a solid, grease, or gel consistency or may be applied as a filmtype TIM, such as a CNT or a graphite based TIM. In some embodiments,the second thermal interface material 113 is formed to a third thicknessT₁₁₃ of between about 20 μm and about 200 μm, such as about 60 μm orabout 120 um. However, any suitable thickness may be used. According tosome embodiments, the second thermal interface material 113 may have athermal conductivity (i.e., “k value”) in Watts per meter-Kelvin (W/mK)of between about 1 W/mK and about 30 W/mK, such as about 4 W/mK, forexample. However, any suitable value of thermal conductivity may beused.

FIG. 1A further illustrates a thermally conductive ring 127 on the firstthermal interface material 111 may be laterally separated from the 3D-ICmodule 105 by the first distance D₁ and also extend to encircle the3D-IC module 105 forming a cavity 128 between inner walls of thethermally conductive ring 127. However, any suitable distance may beused. In an embodiment, the lateral separation between the thermallyconductive ring 127 from the 3D-IC module 105 may be equidistant aroundeach side of the 3D-IC module 105. In other embodiments, the lateralseparation between the thermally conductive ring 127 from the 3D-ICmodule 105 may different around each side of the 3D-IC module 105, e.g.,on one side the thermally conductive ring 127 may be laterally separatedby the first distance D₁ and on another side, the ring may be laterallyseparated by a second distance D₂ that is different from the firstdistance D₁. In an embodiment the thermally conductive ring 127 is usedto provide a thermal path from the first thermal interface material 111to the overlying VC-Lid 131.

In an embodiment the thermally conductive ring 127 may comprise athermally conductive material, such as a material having a thermalconductivity (i.e., “k value”) in Watts per meter-Kelvin (W/mK) greaterthan about 1 W/Mk, such as a thermal conductivity between about 10 W/mKand about 400 W/mK, such as about 380 W/mK. However, any suitablethermal conductivity may be used. In a particular embodiment thethermally conductive ring 127 may comprise a metal such as copper,although any other suitable metal, such as aluminum or the like, mayalso be used. Similarly, dielectric materials, such as silicone, mayalso be utilized as long as they are suitable for the transmission ofheat from the 3D-IC PKG substrate 103 to the VC-Lid 131.

In an embodiment, the thermally conductive ring 127 may be a vaporchamber ring (VC-ring) and may be formed from similar materials and mayfunction during operation similar to the VC-Lid 131 as described above.The materials of the VC-ring may be different from the materials of theVC-Lid 131 according to some embodiments. In other embodiments, thematerials of the VC-ring and the materials of the VC-Lid 131 may be thesame. In some embodiments, the VC-ring may be used to provide adistributed heat transfer from the substrate to a thermally coupledoverlying structure (e.g., the VC-Lid 131). In other embodiments, theVC-ring may not be thermally coupled to the overlying structure and mayprovide a distributed heat transfer from the substrate to theenvironment. Thus, the thermally conductive ring 127 may provide evenfurther increased effectiveness and efficiency of heat transfer awayfrom the 3D-IC PKG substrate 103.

In an embodiment the thermally conductive ring 127 may be placed on thefirst thermal interface material (TIM) 111, and, in one embodiment, mayhave a second thickness T₁₂₇ of between about 0.5 mm and about 3 mm,such as about 0.7 mm. Similarly, the thermally conductive ring 127 mayhave a first width W₁₂₇ of between about 3 mm and about 12 mm, such asabout 5 mm. In some embodiments, the first thermal interface material111 may serve as a flow barrier for a subsequently formed underfill ofthe interposer 107.

In another embodiment, instead of having a single thermally conductivering 127 that encircles the 3D-IC module 105 on the 3D-IC PKG substrate103, multiple thermally conductive rings 127 may be used. In thisembodiment a plurality of thermally conductive rings 127 are placed onthe first thermal interface material 111, for example, with one ringbeing within another thermally conductive ring 127. By using multiplethermally conductive rings 127 instead of a single thermally conductivering, additional support may be provided.

In an embodiment, a heat treatment may be performed in which the firstthermal interface material 111 is in a liquid or semi-solid form, inorder to cure the first thermal interface material 111 such that thefirst thermal interface material 111 becomes solid. The heat treatmentmay be performed by placing the first thermal interface material 111into e.g., a furnace and heating the first thermal interface material111. However, the curing is not intended to be limited as such. Rather,any suitable method for curing the first thermal interface material 111,such as irradiating the first thermal interface material 111 or evenallowing the first thermal interface material 111 to cure at roomtemperature may also be utilized. All suitable methods for curing thefirst thermal interface material 111 are fully intended to be includedwithin the scope of the embodiments.

FIG. 1A further illustrates an application of an underfill material 110between the 3D-IC PKG substrate 103 and the 3D-IC module 105. In anembodiment the underfill material 110 is a silica filled epoxy resin,and may be used to fill the gap space in between the 3D-IC PKG substrate103 and the 3D-IC module 105. The underfill material 110 increasesmechanical reliability by distributing stresses across the top surfaceof the 3D-IC PKG substrate 103 rather than allowing them to becomeconcentrated in, e.g., the module external connections 109. In addition,the underfill material 110 provides encapsulation from moisture andcontaminants in the external environment.

In an embodiment the underfill material 110 may be injected into theregion between the 3D-IC PKG substrate 103 and the 3D-IC module 105. Inan embodiment the underfill material 110 is injected using a nozzle thatis moved around the 3D-IC PKG substrate 103 and the 3D-IC module 105while the nozzle injects the underfill material 110 at relatively highpressure into the region between the 3D-IC PKG substrate 103 and the3D-IC module 105.

FIG. 1A further illustrates a placement of a third thermal interfacematerial 129 over the thermally conductive ring 127. In an embodimentthe third thermal interface material 129 may be similar to the firstthermal interface material 111 and may be used to provide a thermalinterface between the thermally conductive ring 127 (and, hence the3D-IC PKG substrate 103) and the overlying VC-Lid 131. As such, thethird thermal interface 129 may also have a thermal conductivity (i.e.,“k value”) in Watts per meter-Kelvin (W/mK) of between about 1 W/mK andabout 10 W/mK, such as about 4 W/mK. In an embodiment the third thermalinterface material 129 may be formed on the thermally conductive ring127 in either a solid, grease, or gel consistency to a third thicknessT₁₂₉ of between about 50 μm and about 200 μm, such as about 100 μm.However, any suitable thickness may be used. If the third thermalinterface material 129 is disposed as a non-solid, then the thirdthermal interface material 129 may be cured in order to solidify thethird thermal interface material 129.

FIG. 1A also illustrates the placement of a vapor chamber lid (VC-Lid)131 over the 3D-IC PKG substrate 103 and the 3D-IC module 105, and incontact with the third thermal interface material 129 and the secondthermal interface material 113. In an embodiment the VC-Lid 131 isdeployed to protect the 3D-IC PKG substrate 103, and the 3D-IC module105, and any underlying substrate, and also to help spread the heatgenerated from the 3D-IC PKG substrate 103 and the 3D-IC module 105 overa larger area, especially for high power applications such as 3D-ICpackage applications (e.g., chip-on-wafer-on-substrate (CoWoS)). In anembodiment the VC-Lid 131 may comprise copper, aluminum, other metals,alloys, combinations thereof, or other material of high electrical andthermal conductivities. In an embodiment, the VC-Lid 131 has a heightH₁₃₁ of between about 2 mm and about 4 mm, such as about 3 mm and has awidth W₁₃₁ of between about 30 mm and about 100 mm, such as about 60 mm.Once packaged, according to an embodiment, the semiconductor device 100may have a height H₁₀₀ of between about 3 mm and about 7 mm, such asabout 4.8 mm. According to some embodiments, the VC-Lid 131 may have athermal conductivity (i.e., “k value”) in Watts per meter-Kelvin (W/mK)in a first thermal spreading direction (k_(xy)) of between about 10000W/mK and about 20000 W/mK, for example, and in a second thermalspreading direction (k_(z)) of between about 200 W/mK and about 7000W/mK, for example. However, any suitable values of thermal conductivitymay be used.

Referring to FIG. 1B, this figure illustrates a detailed cross-sectionalview of the VC-Lid 131. In an embodiment, the VC-Lid 131 includes anouter shell 133 that encloses, hermetically seals, and defines a cavitybetween inner walls of the outer shell 133 providing a vapor chamber 135within the VC-Lid 131. The outer shell 133 of the VC-Lid 131 comprisesmaterials that possess a high thermal conductivity and a low coefficientof thermal expansion (CTE). According to an embodiment, the VC-Lid 131comprises a material such as copper, copper alloy, copper tungsten(CuW), or aluminum-silicon-carbide (AlSiC). Other suitable thermallyconductive materials and/or thermally insulating materials may also beused. In an embodiment, the VC-Lid 131 has a low coefficient of thermalexpansion substantially similar to a low coefficient of thermalexpansion of the 3D-IC PKG substrate 103.

The thickness of the outer shell 133 of the VC-Lid 131 depends onseveral factors including, but not limited to, heat dissipation rate ofone or more of the plurality of semiconductor dies of the 3D-IC module105, thermal conductivity of the material of the outer shell 133,presence of an external heat sink, a desired size of the semiconductordevice 100, and surface areas of the plurality of semiconductor dies ofthe 3D-IC module 105. According to some embodiments, the outer shell 133of the VC-Lid 131 may comprise sheets of thermally conductive materialhaving a substantially uniform thickness. In other embodiments, theouter shell 133 of the VC-Lid 131 may comprise sheets of thermallyconductive material having different thicknesses. However, any suitableform of thermally conductive material and any suitable variants ofthicknesses may be utilized.

In some embodiments, the dimensions of the vapor chamber 135 may beuniform throughout the VC-Lid 131. For example, the vapor chamber 135may have a same height, a same length, and a same depth throughout theVC-Lid 131. In other embodiments, one or more of the dimensions of thevapor chamber 135 may be varied throughout the VC-Lid 131. For example,the vapor chamber 135 may have one or more different heights, differentlengths, and different depths at different portions within the VC-Lid131. In an embodiment, the vapor chamber 135 of the VC-Lid 131 may havea height H₁₃₁ of between about 2 mm and about 4 mm, such as about 3 mm.However, any suitable heights or dimensions may be utilized.

For example, as illustrated in FIG. 1B according to an embodiment, thevapor chamber 135 sealed within the VC-Lid 131 may contain anevaporating and condensing liquid such as a two-phase vaporizable liquidwhich serves as a working fluid (WF) 137 for the VC-Lid 131. The workingfluid 137 is a liquid that possesses a relatively high latent heat ofvaporization in order to disperse heat away from the 3D-IC module 105.The VC-Lid 131 further comprises a bulk feeding wick layer 139 forreceiving the working fluid 137. The bulk feeding wick layer 139 may behoused and sealed within the vapor chamber 135 and positioned along theinner walls of the outer shell 133 that define the vapor chamber 135. Inan embodiment, the bulk feeding wick layer 139 may have an averagethickness of about 0.1 mm to about 0.5 mm. However, any suitablethickness may be used.

As further illustrated in FIG. 1B, the bulk feeding wick layer 139 maycomprise an evaporator 143 (e.g., metallized carbon-nanotube (CNT)evaporator) including a plurality of metal wires 145 (e.g., CNTevaporator lines, coils, wires, or conductors) arranged adjacent oneanother and woven together. The metal wires 145 have a large amount ofpores therein which generate capillary force for transferring theworking fluid 137. In some embodiments, the plurality of metal wires 145are each shaped such that first portions of the metal wires 145 come inphysical contact with and are thermally coupled to a first surface ofthe vapor chamber 135 in an area located along the first surface of thevapor chamber 135 and located in association with a heat intake area ofthe VC-Lid 131. In some embodiments, second portions of the metal wires145 that interpose adjacent first portions are raised above the firstsurface of the vapor chamber 135. For example, the plurality of metalwires 145 may include a serpentine shape with first portions curvingtowards the first surface of the vapor chamber 135 and interposingsecond portions curving away from the first surface of the vapor chamber135. However, any suitable shape may be used.

FIG. 1B further illustrates a general functional flow of the VC-Lid 131during operation, in accordance with an embodiment. In operation, theVC-Lid 131 works to expel heat generated from the plurality ofsemiconductor dies of the 3D-IC module 105 through one or more areas ofthermal contact 141 (e.g., a heat input area) maintained with the secondthermal interface material 113. In some embodiments, the VC-Lid 131 mayalso work to expel heat generated from the 3D-IC PKG substrate 103through one or more areas of thermal contact 141 maintained with thethird thermal interface material 129 over the thermally conductive ring127. As the VC-Lid 131 operates and works to conduct and expel heat awayfrom the 3D-IC processor 115, the working fluid 137 contained in thebulk feeding wick layer 139 corresponding to an area of thermal contact141 (e.g., the heat input area) of the VC-Lid 131 is heated andvaporizes. The vapor of the working fluid 137 then spreads to fill thevapor chamber 135 sealed within the VC-Lid 131 and wherever the vaporcomes into contact with a surface of the vapor chamber 135 that iscooler than the working fluid's 137 latent heat of vaporization, heat isexpelled through the cooler surfaces (e.g., the heat rejection area 142)of the vapor chamber 135 and the vapor condenses back to its liquid formof the working fluid 137. Once condensed, the working fluid 137 reflowsto the area of thermal contact 141 via a capillary force generated bythe bulk feeding wick layer 139. Thereafter, the working fluid 137frequently vaporizes and condenses to form a circulation to expel theheat generated by the plurality of semiconductor dies of the 3D-ICmodule 105, and/or to expel heat generated, for example, from otherelectronic components of the 3D-IC PKG substrate 103. This arrangementeffectively spreads thermal energy across the VC-Lid 131 so that heatgenerated by the plurality of semiconductor dies of the 3D-IC module 105and from other electronic components of the 3D-IC PKG substrate 103 maybe drawn off via the heat input area 141 and dissipated via the heatrejection area 142 to the surrounding environment in a highly efficientmanner.

According to some embodiments, as illustrated in FIG. 1A, thesemiconductor device 100 including the 3D-IC module 105 and the VC-Lid131 thermally coupled to the 3D-IC module 105 provides greater PKGjunction temperature reduction and provides improved temperatureuniformity or heat spreading performance as compared to the baselinesystem described above. For example, a baseline system including a SoCdie package (e.g., a high performance multi-chip package such as the3D-IC module 105 with total power=400 W) with a solid copper lid and aheat sink that is thermally coupled to the solid copper lid may have amaximum baseline PKG junction temperature T_(maxBL) of about 107.4° C.,a minimum baseline PKG junction temperature T_(minBL) of about 91.9° C.and a temperature uniformity (i.e., temperature gap between T_(maxBL)and T_(minBL)) of about 15.5° C. which corresponds to a baseline heatspreading performance of about 6.5%. As compared to the baseline system,the VC-Lid 131 can reduce the PKG junction baseline maximum temperature,can reduce the PKG junction baseline minimum temperature and can improvethe temperature uniformity of the SoC die by reducing the temperaturegap between T_(maxBL) and T_(minBL).

Turning to FIG. 2, a packaged arrangement 200 may include the packagedsemiconductor device 100 and a heat sink 201. In an embodiment the heatsink 201 may be mounted over and thermally coupled to the VC-Lid 131,the 3D-IC module 105 and the 3D-IC PKG substrate 103. The heat sink 201may be formed using materials exhibiting high thermal conductivity suchas aluminum, copper, other metals, alloys, combinations thereof, and thelike, and aids in the cooling of the 3D-IC PKG substrate 103 and the3D-IC module 105 by increasing a given surface area to be exposed to acooling agent surrounding it such as air. The heat transfer mechanismsoccur through the convection of the surrounding air, the conductionthrough the air, and radiation. For example, the heat sink 201 mayexhibit a much greater surface area for convection compared with thesurface area of the VC-Lid 131, the 3D-IC PKG substrate 103 and the3D-IC module 105 by employing a large number of fins in the form of amatrix of geometrically shaped pins or an array of straight or flaredfins. In another example, such as where convection is low, amatted-black surface color may radiate much more efficiently than shiny,metallic colors in the visible spectrum. Any suitable form for the heatsink may be utilized. In an embodiment the heat sink 201 may have aheight H₂₀₁ of between about 20 mm and about 120 mm, such as about 90mm.

In an embodiment the heat sink 201 has a contact area that is thermallycoupled to the VC-Lid 131 through a fourth thermal interface material(TIM) 213. The fourth thermal interface material 213 may be placed on atop surface of the VC-Lid 131 in order to provide a thermal interfacebetween the VC-Lid 131 and the overlying heat sink 201. In an embodimentthe fourth thermal interface material 213 may be similar to the secondthermal interface material 113, although the fourth thermal interfacematerial 213 may also be different from the second thermal interfacematerial 113. In an embodiment the fourth thermal interface material 213may be disposed onto the VC-Lid 131 in either a solid, grease, or gelconsistency to a fourth thickness T₂₁₃ of between about 50 μm and about500 μm, such as about 100 μm. However, any suitable thickness may beused. According to some embodiments, the fourth thermal interfacematerial 213 may have a thermal conductivity (i.e., “k value”) in Wattsper meter-Kelvin (W/mK) of between about 5 W/mK and about 10 W/mK, forexample. However, any suitable value of thermal conductivity may beused.

In the packaged arrangement 200 shown in FIG. 2, the thermal energyspread across the VC-Lid 131 provides for a large footprint at thecontact area of the heat sink 201 which allows for an improved thermalperformance of the heat sink 201 and thus of the overall package of thepackaged arrangement 200. For example, as the VC-Lid 131 draws off andtransfers heat generated by the plurality of semiconductor dies of the3D-IC module 105 and from other electronic components of the 3D-IC PKGsubstrate 103 to the heat sink 201, the large footprint allows for abigger area of the heat sink 201 to draw off and transfer heat moreefficiently from the VC-Lid 131 to the surrounding environment.Therefore, the packaged arrangement 200 provides greater thermalperformance for the semiconductor device 100.

According to some embodiments, as illustrated in FIG. 2, the packagedarrangement 200 including the 3D-IC module 105, the VC-Lid 131 thermallycoupled to the 3D-IC module 105 and the heat sink 201 thermally coupledto the VC-Lid 131 may offer further PKG junction temperature reductionand heat spreading performance improvement as compared to the baselinesystem described above. In an embodiment, the SoC die package includingthe vapor chamber lid (VC-Lid) 131 and the heat sink thermally coupledto the VC-Lid may reduce the PKG junction temperatures T_(maxBL) andT_(minBL) to about 84.5% of the baseline temperatures and may provideabout 300% heat spreading performance as compared to the baselinesystem. For example, the VC-Lid 131 with thermally coupled heat sink 201may have a reduced maximum PKG junction temperature T_(max-SoC) of about90.8° C. and may have a reduced maximum PKG junction temperatureT_(mm-SoC) of about 85.6° C. The improved temperature uniformity orimproved temperature gap between T_(max-SoC) and T_(min-SoC) is about5.1° C. which corresponds to a heat spreading performance of about19.5%. Accordingly, the heat spreading performance of about 19.5% of thearrangement including the thermally coupled combination of the VC-Lid131 and the heat sink 201 as compared to the baseline heat spreadingperformance of about 6.5% shows that this arrangement has a heatspreading performance of about 300% as compared to the heat spreadingperformance of the baseline system.

FIG. 3 illustrates a packaged arrangement 300 including thesemiconductor device 100, a vapor chamber heat sink (VC-HS) 331, and theheat sink 201. In an embodiment, the fourth thermal interface material213 may be applied to a top surface of the VC-Lid 131 or to a surface ofthe VC-HS 331 in order to provide a thermal interface between the VC-Lid131 and the overlying vapor chamber heat sink (VC-HS) 331. In anembodiment, the VC-HS 331 has a height H₃₃₁ of between about 1 mm andabout 3 mm, such as about 2 mm and has a width W 331 of between about 50mm and about 200 mm, such as about 100 mm. Once packaged, according toan embodiment, the packaged arrangement 300 may have a height H₃₀₀ ofbetween about 20 mm and about 150 mm, such as about 100 mm. According tosome embodiments, the VC-HS 331 may have a thermal conductivity (i.e.,“k value”) in Watts per meter-Kelvin (W/mK) in a first thermal spreadingdirection (k_(xy)) of between about 10000 W/mK and about 20000 W/mK, forexample, and in a second thermal spreading direction (ky) of betweenabout 200 W/mK and about 7000 W/mK, for example. However, any suitablevalues of thermal conductivity may be used.

In some embodiments, the vapor chamber heat sink (VC-HS) 331 may beformed from similar materials and function during operation similar tothe VC-Lid 131 as described above with respect to FIG. 1A. The materialsof the VC-HS 331 may be different from the materials of the VC-Lid 131according to some embodiments. In other embodiments, the materials ofthe VC-HS 331 and the materials of the VC-Lid 131 may be the same. TheVC-HS 331 may be used to provide a distributed heat transfer from theVC-Lid 131 to the overlying heat sink 201, thereby providing an evenfurther increased effectiveness and efficiency of heat transfer from the3D-IC module 105 and from the 3D-IC PKG substrate 103 to the heat sink201.

In an embodiment, a fifth thermal interface material (TIM) 313 may beapplied to a top surface of the VC-HS 331 or to a surface of the heatsink 201 in order to provide a thermal interface between the VC-HS 331and the overlying heat sink 201. In some embodiments, a material of thefifth thermal interface material 313 (e.g., solder) may be a differentmaterial from the material of the fourth thermal interface material 213.In other embodiments, the material of the fifth thermal interfacematerial 313 may be the same material used for the fourth thermalinterface material 213. In an embodiment the fifth thermal interfacematerial 313 may be applied in either a solid, grease, or gelconsistency to the fifth thickness T 313 of between about 50 μm andabout 200 μm, such as about 100 μm. However, any suitable thermalinterface materials and thickness may be used. According to someembodiments, the fifth thermal interface material 313 may have a thermalconductivity (i.e., “k value”) in Watts per meter-Kelvin (W/mK) ofbetween about 1 W/mK and about 10 W/mK, such as k=5.8 W/mK. In someembodiments, the fifth thermal interface material 313 is a material suchas metallic solder TIM, a metallic sheet TIM, or a film type TIM such asCNT or graphite based TIM, which may have a thermal conductivity (i.e.,“k value”) in Watts per meter-Kelvin (W/mK) of between about 30 W/mK to50 W/mK and about 86 W/mK, for example. However, any suitable values ofthermal conductivity may be used.

In the packaged arrangement 300 shown in FIG. 3, the thermal energyspread across the VC-Lid 131 provides for a large footprint at thecontact area of the VC-HS 331 which allows for an improved thermalperformance of the VC-HS 331 and thus of the overall package of thepackaged arrangement 300. For example, as the VC-Lid 131 draws off heatgenerated by the plurality of semiconductor dies of the 3D-IC module 105and from other electronic components of the 3D-IC PKG substrate 103, theVC-Lid 131 spreads the thermal energy of the drawn off heat across acontact area of the VC-HS 331. In other words, the VC-Lid 131 allows forheat generated by the plurality of semiconductor dies of the 3D-ICmodule 105 and from other electronic components of the 3D-IC PKGsubstrate 103 to be transferred through the fourth thermal interfacematerial TIM 213 to the VC-HS 331 in a highly efficient manner. Oncetransferred to the VC-HS 331, the thermal energy is spread furtheracross the VC-HS 331 providing for an even larger footprint at thecontact area of the heat sink 201, as compared to the footprint providedby the VC-Lid 131, allowing for an even more improved thermalperformance of the heat sink 201 and thus of the overall package of thepackaged arrangement 300. For example, as the VC-HS 331 draws off andtransfers heat from the VC-Lid 131 to the heat sink 201, the even largerfootprint allows for a bigger area of the heat sink 201 (e.g., theentire surface of the heat sink 201 facing the VC-HS 331) to draw offand transfer heat even more efficiently from the VC-HS 331 to thesurrounding environment. Therefore, the packaged arrangement 300provides an even greater thermal performance for the semiconductordevice 100.

With regard to the vapor chamber heat sink (VC-HS), the VC-HS has athermal improvement performance similar or equivalent to the VC-Lid.According to some embodiments, as illustrated in FIG. 3, the packagedarrangement 300 including the 3D-IC module 105, the VC-Lid 131 thermallycoupled to the 3D-IC module 105, the VC-HS 331 thermally coupled to theVC-Lid 131 and the heat sink 201 thermally coupled to the VC-HS 331 mayoffer PKG junction temperature reduction and heat spreading performanceimprovement as compared to the baseline system described above. Forexample, the packaged arrangement 300 may reduce the PKG junctiontemperatures T_(maxBL) and T_(minBL) to about 84.3% of the baselinetemperatures and may provide about 288% heat spreading performance ascompared to the baseline system. For example, the packaged arrangement300 may have a reduced maximum PKG junction temperature T_(max-SoC) ofabout 92.6° C. and may have a reduced maximum PKG junction temperatureT_(min-SoC) of about 87.3° C. The improved temperature uniformity orimproved temperature gap between T_(max-SoC) and T_(mm-SoC) is about5.3° C. which corresponds to a heat spreading performance of about18.7%. Accordingly, the heat spreading performance of about 18.7% of thepackaged arrangement 300 as compared to the baseline heat spreadingperformance of about 6.5% shows that this arrangement has a heatspreading performance of about 288% as compared to the heat spreadingperformance of the baseline system.

With reference to FIG. 4, a packaged arrangement 400 may include thesemiconductor device 100 and a conductive sheet 401. In an embodimentthe conductive sheet 401 may be mounted over and thermally coupled tothe VC-Lid 131, the 3D-IC module 105 and the 3D-IC PKG substrate 103.The conductive sheet 401 may provide extra structural support,structural integrity, and added protection to the VC-Lid 131 extendingover larger areas, especially for package applications includingmultiple dies such as 3D-IC package applications (e.g.,chip-on-wafer-on-substrate (CoWoS)) and to provide suitable heatdissipation. The conductive sheet 401 may be implemented using low costmaterials and techniques in manufacturing while providing increasedreliability of the semiconductor device 100.

In some embodiments, the conductive sheet 401 may be formed usingsimilar materials as that of the outer shell 133 of the VC-Lid 131 withsimilar thermal conductivity characteristics and similar coefficient ofthermal expansion (CTE) properties. According to an embodiment, theconductive sheet 401 comprises a material such as copper, copper alloy,copper tungsten (CuW), indium, indium alloy or aluminum-silicon-carbide(AlSiC). Other suitable materials may also be used. In some embodiments,the conductive sheet 401 has a low coefficient of thermal expansionsubstantially similar to a low coefficient of thermal expansion of oneor more of the materials of the VC-Lid 131 and the 3D-IC PKG substrate103. However, in other embodiments, one or more of the materials of theconductive sheet 401 may be different from the materials of the outershell 133 of the VC-Lid 131. In an embodiment, the conductive sheet 401may have a thickness T₄₀₁ of between about 0.1 mm and about 0.35 mm,such as about 0.25 mm. In an embodiment, the combination of VC-Lid 131and conductive sheet 401 may have a combined thickness T₄₀₂ of betweenabout 2200 mm and about 3800 mm, such as about 3.25 mm. In an embodimentthe conductive sheet 401 has one or more contact areas that are bonded(e.g., solder bonding, metal-to-metal bonding, etc.) to the VC-Lid 131.However, any suitable bonding process may be used. Once assembled,according to embodiments, the packaged arrangement 400 may have anoverall height H₄₀₀ of between about 5 mm and about 8 mm, such as about6 mm.

With reference to FIG. 5, a packaged arrangement 500 may include the3D-IC PKG substrate 103, the 3D-IC module 105, an embedded VC-Lid 531,and a VC-Lid Frame 535. In an embodiment, the 3D-IC PKG substrate 103 isbonded to the first side of the 3D-IC module 105, the VC-Lid Frame 535is connected to the 3D-IC PKG substrate 103 via the first thermalinterface material (TIM) 111 and supports the embedded VC-Lid 531 andthe embedded VC-Lid 531 is bonded to the second side of the 3D-IC module105 via the fourth thermal interface material (TIM) 213.

In an embodiment the first thermal interface material (TIM) 111 isthermally coupled to the VC-Lid Frame 535 and may be spaced from the3D-IC module 105 at the same first distance D₁ and same second distanceD₂ and have the same thickness T₁₁₁, as discussed above with respect toFIG. 1A. In other embodiments, the first thermal interface material 111may be spaced apart from the 3D-IC module 105 based on one or more of athickness T₅₃₅ of the VC-Lid Frame 535 and a location of the 3D-ICmodule 105 on the 3D-IC PKG substrate 103. In an embodiment, thethickness T₅₃₅ of the VC-Lid Frame 535 may be between about 3 mm andabout 15 mm, such as about 5 mm. However, any suitable thicknesses anddistances may be used.

According to some embodiments, the first thermal interface material 111is arranged to have a large amount of surface area contact with the3D-IC PKG substrate 103 and with the VC-Lid Frame 535 increasing theability of heat to be transferred from the 3D-IC PKG substrate 103,through the first thermal interface material 111 and through the VC-LidFrame 535, in order to aid in the removal of heat from the 3D-IC PKGsubstrate 103. In an embodiment, the VC-Lid Frame 535 may comprise athermally conductive material, such as a material having a thermalconductivity (i.e., “k value”) in Watts per meter-Kelvin (W/mK) that isgreater than 1 W/mK. In some embodiments, the VC-Lid Frame 535 comprisesa thermally conductive material having a thermal conductivity of betweenabout 200 W/mK and about 400 W/mK, such as about 380 W/mK. In aparticular embodiment the suspended VC-Lid Frame 535 may comprise ametal such as copper, although any other suitable metal, such asaluminum or the like, may also be used. Similarly, dielectric materials,such as silicone, may also be utilized as long as they are suitable forthe transmission of heat from the 3D-IC PKG substrate 103 to thesuspended VC-Lid 531.

As further illustrated in FIG. 5, the VC-Lid Frame 535 may be used toprovide both support for the suspended VC-Lid 531 and to provide athermal path from the 3D-IC PKG substrate 103. In some embodiments, theVC-Lid Frame 535 may be bonded to the first thermal interface material111 and may be laterally separated from the 3D-IC module 105 on one sideby the first distance D₁ and on another side by the second distance D₂.The VC-Lid Frame 535 may also extend to encircle the 3D-IC module 105forming the cavity 128 between inner walls of the VC-Lid Frame 535.According to some embodiments, the first distance D₁ and the seconddistance D₂ of the VC-Lid Frame 535 may be the same as the firstdistance D₁ and the second distance D₂ of the thermally conductive ring127 discussed above with regard to FIG. 1A and in other embodiments, thefirst distance D₁ and the second distance D₂ of the VC-Lid Frame 535 maybe different from the first distance D₁ and the second distance D₂ ofthe thermally conductive ring 127. However, any suitable distance may beused. In some embodiments, portions of the VC-Lid Frame 535 may overlieand be thermally coupled to portions of the second surface of the 3D-ICmodule 105 via the fourth thermal interface material 213.

As further illustrated in FIG. 5, the VC-Lid Frame 535 may support thesuspended VC-Lid 531 over a certain area of the 3D-IC module 105 at athird distance D 3 from an outer edge of the VC-Lid Frame 535 and at afourth distance D₄ of the suspended VC-Lid 531 from another outer edgeof the VC-Lid Frame 535. According to an embodiment, the suspendedVC-Lid 531 is supported at the third distance D 3 and the fourthdistance D₄ from the outer edge of the VC-Lid Frame 535 based on alocation of a desired certain area of the 3D-IC module 105 to be cooled.For example, the suspended VC-Lid 531 may be positioned over a“hot-spot” area which is a certain area that experiences a greateramount of generated heat as compared to other areas of the 3D-IC module105. For example, the VC-Lid Frame 535 may be configured to suspend thesuspended VC-Lid 531 in the location over the 3D-IC processor 115 whichmay generate a greater amount of heat as compared to other areas of the3D-IC module 105 (e.g., areas over the 3D-IC memory dies 117) or ascompared to other areas over the 3D-IC PKG substrate 103 not occupied bythe 3D-IC module 105.

The suspended VC-Lid 531 may be formed from similar materials and duringoperation, may function similar to the VC-Lid 131, as discussed abovewith respect to FIG. 1A. As shown in FIG. 5, the suspended VC-Lid 531may be suspended by the VC-Lid Frame 535 over a “hot-spot” area (e.g.,over the 3D-IC processor 115) of the 3D-IC module 105 and a portion ofthe suspended VC-Lid 531 may be thermally coupled to the second surfaceof the 3D-IC module 105 via the fourth thermal interface material 213.In an embodiment, the thermally coupled portion of the suspended VC-Lid531 has a first width W₅₃₁ which may be between about 10 mm and about 40mm, such as about 25 mm. In some embodiments, portions of the suspendedVC-Lid 531 may be in direct contact with and may be thermally coupled toportions of the VC-Lid Frame 535. According to some embodiments, thesuspended VC-Lid 531 may have a thermal conductivity (i.e., “k value”)in Watts per meter-Kelvin (W/mK) in a first thermal spreading direction(k_(xy)) of between about 10000 W/mK and about 20000 W/mK, for example,and in a second thermal spreading direction (k_(z)) of between about 200W/mK and about 7000 W/mK, for example. However, any suitable values ofthermal conductivity may be used.

In yet another embodiment the VC-Lid 131 may be embedded or integrallyformed within a conductive lid or within a conductive frame. Forexample, the suspended VC-Lid 531 may be located over a hot spot of the3D-IC module 105 (e.g., the GPU) while a remainder of the conductive lidor the conductive frame may extend over the other structures within thepackage.

In an embodiment, the suspended VC-Lid 531 comprises flanges 533 thatare supported by underlying supporting members of the VC-Lid Frame 535.The flanges 533 of the suspended VC-Lid 531 may be bonded to theunderlying supporting members of the VC-Lid Frame 535. In someembodiments, the flanges 533 may be bonded to the underlying supportingmembers of the VC-Lid Frame 535 via a sixth thermal interface material(TIM) 513. However, other bonding methods and materials (e.g., solder)may be used to bond the flanges 533 to the VC-Lid Frame 535. In anembodiment, the flanges 533 of the suspended VC-Lid 531 have a widthW₅₃₃ that may be between about 3 mm and about 6 mm, such as about 4 mm.

Once assembled, the packaged arrangement 500 may have an overall heightH₅₀₀ of between about 4 mm and about 8 mm, such as about 5.5 mm. Thepackaged arrangement 500 may also utilize one or more of the heat sink201, the vapor chamber heat sink (VC-HS) 331 and the conductive sheet401 as discussed above in regards to FIGS. 2-4.

In some embodiments the suspended VC-Lid 531 may be embedded orintegrally formed within a conductive lid or within a conductive frame(e.g., VC-Lid Frame 535). For example, the suspended VC-Lid 531 may belocated over a hot spot of the 3D-IC module 105 (e.g., located over the3D-IC processor 115 such as a graphics processing unit (GPU)) while aremainder of the conductive lid may extend over a remainder of thestructures within the 3D-IC module 105. This allows for low cost customdesigns to be implemented by locating the suspended VC-Lid 531 directlyover a specific hot spot of a custom 3D-IC module 105 for each product.Using the suspended VC-Lid 531 reduces any invalid thermal spreadingarea of the suspended VC-Lid 531 which may lower the cost ofimplementation for very large highly integrated packages.

FIG. 6 illustrates a packaged arrangement 600 which may include the3D-IC PKG substrate 103, the 3D-IC module 105, the thermally conductivering 127, the vapor chamber heat sink (VC-HS) 331, and the heat sink201. In an embodiment, the 3D-IC PKG substrate 103 is bonded to thefirst side of the 3D-IC module 105, the thermally conductive ring 127 isbonded to the 3D-IC PKG substrate 103 via the first thermal interfacematerial (TIM) 111, the VC-HS 331 is bonded to the second side of the3D-IC module 105 via the second thermal interface material (TIM) 113 andthe heat sink 201 is bonded to VC-HS 331 via the fifth thermal interfacematerial (TIM) 313.

FIG. 6 further illustrates a gap 615 between an upper surface of thethermally conductive ring 127 and a lower surface of the VC-HS 331. Thethermally conductive ring 127 may be bonded and thermally coupled to the3D-IC PKG substrate 103 via the first thermal interface material (TIM)111. The opposite end of the thermally conductive ring 127 from the endbonded and thermally coupled to the 3D-IC PKG substrate 103 may beseparated from the VC-HS 331 by the gap 615. Accordingly, a thermal pathfrom the first thermal interface material 111 is formed to expel heattransferred from components of the 3D-IC PKG substrate 103 to thesurrounding environment. In addition, during operation of the packagedarrangement 600, heat generated from the 3D-IC PKG substrate 103 andfrom the 3D-IC module 105 may be vented through the gap 615 in order toallow heat to escape from the cavity 128 in order to maintain a lowertemperature surrounding the 3D-IC module 105.

In an embodiment, the gap 615 may have a height H₆₁₅ that corresponds tothe thickness of the second thermal interface material (TIM) 113. Inother embodiments, the height H₆₁₅ of the gap 615 may be different fromthe thickness of the second thermal interface material 113. In anembodiment, the height H₆₁₅ of the gap 615 may be between about 0.03 mmand about 0.2 mm, such as about 0.05 mm. However, any suitable heightmay be used for the gap 615.

The vapor chamber heat sink (VC-HS) 331 may be used to provide adistributed heat transfer directly from the 3D-IC module 105 to theoverlying heat sink 201, thereby providing an increased effectivenessand efficiency of heat transfer from the 3D-IC module 105 to the heatsink 201. In the packaged arrangement 600 shown in FIG. 6, the thermalenergy spread across the VC-HS 331 provides for a large footprint at thecontact area of the heat sink 201 which allows for an improved thermalperformance of the heat sink 201 and thus the overall packagedarrangement 600. For example, as the VC-HS 331 draws off heat generatedby the plurality of semiconductor dies of the 3D-IC module 105, theVC-HS 331 spreads the thermal energy of the drawn off heat across acontact area of the heat sink 201. In other words, the VC-HS 331 allowsfor heat generated by the plurality of semiconductor dies of the 3D-ICmodule 105 to be transferred through the fifth thermal interfacematerial 313 to the heat sink 201 in a highly efficient manner. Forexample, as the VC-HS 331 draws off and transfers heat from theplurality of semiconductor dies of the 3D-IC module 105 to the heat sink201, the large footprint allows for a bigger area of the heat sink 201(e.g., the entire surface of the heat sink 201 facing the VC-HS 331) todraw off and transfer heat more efficiently to the surroundingenvironment. Therefore, the packaged arrangement 600 provides a greaterthermal performance for the semiconductor device 100.

According to some embodiments, as illustrated in FIG. 6, the arrangement600 including the 3D-IC module 105, the thermally conductive ring 127forming a cavity for the 3D-IC module 105, the VC-HS 331 thermallycoupled to the 3D-IC module 105 with a gap 615 between the thermallyconductive ring 127 and the VC-HS 331, and the heat sink 201 thermallycoupled to the VC-HS 331 may offer PKG junction temperature reductionand heat spreading performance as compared to the baseline systemdescribed above. For example, the arrangement 600 may reduce the PKGjunction temperatures T_(maxBL) and T_(minBL) to about 83.9% of thebaseline temperatures and may provide about 292% heat spreadingperformance as compared to the baseline system. Furthermore, thearrangement 600 may have a reduced maximum PKG junction temperatureT_(max-SoC) of about 90.2° C. and may have a reduced maximum PKGjunction temperature T_(min-SoC) of about 84.9° C. The improvedtemperature uniformity or improved temperature gap between T_(max-SoC)and T_(min-SoC) is about 5.3° C. which corresponds to a heat spreadingperformance of about 19.0%. Accordingly, the heat spreading performanceof about 19.0% of the arrangement 600 as compared to the baseline heatspreading performance of about 6.5% shows that this arrangement has aheat spreading performance of about 292% as compared to the heatspreading performance of the baseline system.

FIG. 7 is an overhead view illustrating an internal fan out on substrate(InFO oS) package 700 with an integrated InFO oS vapor chamber Lid(VC-Lid) 731, according to some embodiments. The integrated InFO oSVC-Lid 731 is illustrated in “cut-away” form in order to betterillustrate the components of the InFO oS package 700. The InFO oSpackage 700 comprises a system substrate 701, a plurality of system onchip (SoC) dies (e.g., a first SoC die 703 and a second SoC die 705)electrically coupled to a surface of the system substrate 701 andembedded in a molding compound 707, wherein the integrated InFO oSVC-Lid 731 overlies and is thermally coupled to the plurality of SoCdies (703, 705), according to some embodiments.

The system substrate 701 may be similar to the 3D-IC PKG substrate 103,as described above or may be any suitable substrate for use in packaginga plurality of SoC dies. The first SoC die 703 may be, for example, afirst 3D-IC processing die (e.g., a first 3D-IC module 105) and thesecond SoC die 705 may be, for example, a second 3D-IC processing die(e.g., a second 3D-IC module 105). However, the first SoC die 703 andthe second SoC die 705 may be any suitable semiconductor dies and arenot limited to system on chip configurations. According to someembodiments, the integrated InFO oS VC-Lid 731 may have a width W₇₃₁ ofbetween about 50 mm and about 100 mm, such as about 60 mm and may have alength L₇₃₁ of between about 50 mm and about 100 mm, such as about 60mm. However, any suitable width W₇₃₁ and any suitable length may be usedfor the width W₇₃₁ and length L₇₃₁ of the integrated InFO oS VC-Lid 731.

FIG. 8 is a cross-sectional view illustrating the InFO oS package 700 ofFIG. 7. According to some embodiments, the plurality of system on chip(SoC) dies (703, 705) may be electrically coupled to a surface of thesystem substrate 701 via an InFO redistribution layer (RDL) 801. TheInFO RDL 801 includes a series stack of alternating layers of a seriesof conductive layers 803 and a series of dielectric layers 805. In someembodiments, the series of conductive layers 803 may include a pluralityof conductive lines and a plurality of conductive vias formed of one ormore metal materials (e.g., copper (Cu), gold (Au), alloys thereof andthe like) via a processes such as plating, however, any suitablematerials and any other suitable methods of deposition (e.g., CVD orPVD) may be used to form the plurality of conductive lines and theplurality of conductive vias of the series of conductive layers 803. Theseries of dielectric layers 805 may be formed of any suitable dielectricmaterials such as polybenzoxazole (PBO), polyimide or a polyimidederivative using any suitable deposition method (e.g., spin-coatingprocess). However, any suitable methods may be used for forming theseries of conductive layers 803 within the series of dielectric layers805.

According to embodiments, the plurality of conductive lines and theplurality of conductive vias of the conductive layers 803 areelectrically connected through the series of dielectric layers 805 froma first side of the InFO RDL 801 to a second side of the info RDL 801.The electrical connection may be formed by either forming the InFO RDL801 on the SoC dies (703, 705) after the SoC dies have beenencapsulated, or else forming the InFO RDL 801, placing the SoC dies(703, 705) on the InFO RDL 801, and then encapsulating the SoC dies(703, 705). Any suitable method of manufacturing the SoC dies (703, 705)may be utilized.

Once encapsulated and connected, external InFO contacts 807 are formedto contact areas of the second surface of the info RDL 801. The externalInFO contacts 807 may be formed using one or more of the materials andusing one or more of the methods used to form the module externalconnections 109, as described above. For example, the external InFOcontacts 807 may be formed as solder balls, C4 bumps, micro-bumps,pillars, columns, or other structures formed from a conductive materialsuch as solder, metal, or metal alloy. As such, the external InFOcontacts 807 facilitate electrical, physical, and thermal connectivitybetween the SoC dies (703, 705) and contact areas of a first surface ofthe system substrate 701.

Once the SoC dies (703, 705) are electrically coupled to the systemsubstrate 701, the first thermal interface material 111 may be formed asa ring over a surface of the system substrate 701 encircling theconnections between the InFO contacts 807 and the contact areas of thefirst side of the system substrate 701. According to some embodiments,the first interface material 111 may be formed over the system substrate701 to a thickness T₈₁₁ of between about 0.05 mm and about 0.2 mm, suchas about 0.1 mm and may be formed to a ring width W₈₁₁ of between about2 mm and about 10 mm, such as about 3 mm. An optional underfill 110 maybe formed of one or more same materials using one or more same methodsof deposition as used to provide the underfill 110 under the interposer107, as described above.

Once the first and second SoC dies (703, 705) are electrically coupledto the system substrate 701, the second thermal interface material 113may also be formed as a layer over the first and second SoC dies (703,705) and surfaces of the molding compound 707. In some embodiments, thesecond thermal material 113 may be formed over the first and second SoCdies (703, 705) to a thickness T₈₁₃ of between about 0.03 mm and about0.15 mm, such as about 0.06 mm.

Once the first thermal interface material 111 and the second thermalinterface material 113 have been deposited, the integrated InFO oSVC-Lid 731 may be arranged over and pressed in contact with the firstthermal interface material 111 and the second thermal interface material113 to physically and thermally connect the integrated InFO oS VC-Lid731 to the surfaces of the SoC dies (703, 705) and to the systemsubstrate 701. As such, the integrated InFO oS VC-Lid 731 serves totransfer heat via the first and second thermal interfaces materials(111, 113) through the heat input area 141 to the heat rejection area142 of the integrated InFO oS VC-Lid 731, as illustrated in detail FIG.1B with regard to VC-Lid 131.

The integrated InFO oS VC-Lid 731 may be constructed and functionaccording to any of the embodiments disclosed herein with regard to theother figures; however, the integrated InFO oS VC-Lid 731 may have asize suitable for packaging the plurality of SoC dies (703, 705) of theInFO oS package 700. For example, the integrated InFO oS VC-Lid 731 maycomprise a vapor chamber 135 that spans the entire width W₇₃₁ of theInFO oS package 700 similar to the VC-Lid 131 illustrated in FIGS. 1Aand 1B. The integrated InFO oS VC-Lid 731 may be suitable for beingphysically and thermally coupled to one or more of a heat sink, a vaporchamber heat sink and/or a metal sheet similar to the heat sink 201, theVC-HS 331 and/or the metal sheet 401 as illustrated in FIGS. 2-4. Theintegrated InFO oS VC-Lid 731 may comprise an embedded vapor chamber lidthat spans only a portion of the width W₇₃₁ of the InFO oS package 700and is arranged over one or more of the SoC dies (703, 705) and issupported by a VC-frame portion similar to the VC-Lid 531 and VC-frame535 illustrated in FIG. 5.

External package contacts 815 may be formed to the second surface of the701 using any suitable contact and any suitable method to form theexternal package contacts 815. In some embodiments, the external packagecontacts 815 may be formed as a ball grid array (BGA) of the InFO oSpackage 700. The external package contacts 815 may be contact bumpscomprising a material such as tin, silver, lead-free tin, or copper andmay be formed using any suitable method, such as, evaporation,electroplating, printing, solder transfer, ball placement, etc., to athickness of, e.g., about 440 μm, according to some embodiments. Once alayer of tin has been formed on the structure, a reflow may be performedin order to shape the material into the desired bump shape.

FIG. 9 is an overhead view illustrating a system on wafer (SoW) package900 with an integrated SoW vapor chamber Lid (VC-Lid) 931, according tosome embodiments. The integrated SoW 931 is illustrated in “cut-away”form in order to better illustrate the components of the SoW package900. The SoW package 900 comprises a plurality of system on chip (SoC)dies (e.g., a first SoC die 903 and a second SoC die 905) that arearranged and bonded to the surface of a support wafer 901. For example,the first and second SoC dies (903, 905) are formed on another wafer andthen tested. Once tested, the dies which pass through testing may besingulated from the wafer and arranged on the support wafer 901 as“known good dies.”

The support wafer 901 may be formed of a same material as one or more ofthe system substrate 701 and the 3D-IC PKG substrate 103, as describedabove or may be any suitable substrate for use in packaging a pluralityof SoC dies. In an embodiment, the radius R₉₀₁ of the support wafer 901may be between about 100 mm and about 225 mm, such as about 150 mm. Thefirst plurality of SoC dies 903 may be, for example, a plurality offirst 3D-IC processing dies (e.g., a first plurality of 3D-IC modules105) and the second plurality of SoC dies 905 may be, for example, asecond plurality of 3D-IC processing dies (e.g., a second plurality of3D-IC modules 105). However, the first plurality of SoC dies 903 and thesecond plurality of SoC dies 905 may be any suitable plurality ofsemiconductor dies.

In some embodiments, the plurality of SoC dies 903 and the plurality ofsecond SoC dies 905 may be arranged in an array of adjacent diesincluding a series of rows and a series of columns of the plurality ofSoC dies (903, 905) with one or more columns of the first plurality ofSoC dies 903 being arranged adjacent one or more columns of the secondplurality of SoC dies 905. However, any suitable combination and anysuitable arrangement of the first plurality of SoC dies 903 and thesecond plurality of SoC dies 905 may be utilized. In some embodiments,the first plurality of SoC dies 903 and the second plurality of SoC dies905 may have a first die width Die W1 of between about 10 mm and about30 mm, such as about 25 mm and a second die width Die W2 of betweenabout 10 mm and about 30 mm, such as about 25 mm. According to someembodiments, the array of adjacent dies may have a first die to die gapGap D1 of between about 4 mm and about 15 mm, such as about 5 mm and asecond die gap Gap D2 of between about 4 mm and about 15 mm, such asabout 5 mm. However any suitable die widths may be utilized for thefirst die width Die W1 and the second die width Die W2 and any suitabledie gaps may be utilized for the first die gap Gap D1 and the second diegap Gap D2.

Once arranged, the plurality of first and second SoC dies (903, 905) maybe embedded in the molding compound 707 and subsequently planarized(e.g., via a chemical mechanical planarization (CMP) method) to exposethe backside surfaces of the SoC dies (903, 905) through the moldingcompound 907. Once exposed, a layer of the thermal interface material113 may be deposited over and in contact with the exposed backsidesurfaces of the array of the first and second SoC dies (903, 905). Oncedeposited, the thermal interface material 113 may serve to physicallyand thermally couple the integrated SoW VC-Lid 931 to the backsidesurfaces of the plurality of SoC dies (703, 705), according to someembodiments.

The integrated SoW VC-Lid 931 may have a width W₉₃₁ of between about 100mm and about 200 mm, such as about 150 mm and may have a length L₉₃₁ ofbetween about 100 mm and about 200 mm, such as about 150 mm, accordingto some embodiments. However, any suitable width and any suitable lengthmay be used for the width W₉₃₁ and length L₉₃₁ of the integrated SoWVC-Lid 931.

FIG. 10 is a cross-sectional view illustrating a SoW package 1000including the SoW package 900 of FIG. 9 after removal from the systemsubstrate 901 and attachment of the singulated SoW package 900 to asocket module 1011 via fasteners 1017. FIG. 10 further illustrates awafer level redistribution layer (RDL) 1001 formed between the array offirst and second SoC dies (903, 905) a plurality of the external InFOcontacts 807 on an opposite side of the wafer level RDL 1001.

Once the array of first and second SoC dies (903, 905) are arranged andembedded in the molding compound 907, the wafer level RDL 1001 may beformed over contact areas of the first and second SoC dies (903, 905).The wafer level RDL 1001 comprises a series stack of alternating layersof the series of conductive layers 803 and the series of dielectriclayers 805 electrically coupling one or more of the plurality of systemon chip (SoC) dies (903, 905) on a first side of the wafer level RDL1001 to one or more of the external InFO contacts 807 on a second sideof the wafer level RDL 1001. In some embodiments, the wafer level RDL1001 spans the entire width of the SoW package 900.

In some embodiments, the wafer level RDL 1001 may be formed prior to themounting of the integrated SoW VC-Lid 931. In other embodiments, theintegrated SoW VC-Lid 931 may be mounted prior to forming the waferlevel RDL 1001. Once the wafer level RDL 1001 has been formed and theintegrated SoW VC-Lid 931 has been mounted, the SoW package 900 may beattached to the socket module 1011 using the fasteners 1017. The socketmodule 1011 includes a plurality of external connections 1013, which insome embodiments may be pins such as pogo pins including ground pins andsignal pins, and which may be used, for example, to probe one or moredevices under test (DUT). In some embodiments, the fasteners 1017 maybe, for example, screws that extend through the body of the singulatedSoW package 900 to threaded spacers 1015 of the socket module 1011. Assuch, the heads of the fastener 1017 pull the integrated SoW VC-Lid 931in contact with the thermal interface material 113 towards the socketmodule 1011 as the fasteners 1017 are tightened, for example, byrotation of the threaded ends of the fasteners 1017 within the threadedspacers 1015 of the socket module 1011. Although the fasteners 1017 arecharacterized as screws in FIG. 10, any suitable fasteners (e.g.,clamps) may be used to attach the singulated SoW package 900 to thesocket module 1011.

FIG. 11 illustrates an embodiment of the SoW package 1000 with the SoWpackage 900 disposed between the SoW VC-Lid 931 and the socket module1011 (with fasteners 1017 hidden for clarity of the followingdiscussion). FIG. 11 illustrates the thermal interface material 113 andan adhesive layer 1113 for thermally coupling the SoW VC-Lid 931 to thesurface of the singulated SoW package 900. As illustrated in FIG. 11 andaccording to some embodiments, portions of the thermal interfacematerial 113 are disposed between and thermally couples a plurality of“hot spots” (e.g., each pair of SoC dies (903A, 905A; 903B, 905B; and903C, 905C)) of the singulated SoW package 900 to the SoW VC-Lid 931.Also illustrated in FIG. 11, are a plurality of portions of the adhesivelayer 1113 on portions of the molding compound 907 and separating theportions of the thermal interface material 113. The plurality ofportions of the adhesive layer 1113 are disposed between the moldingcompound 907 and the SoW VC-Lid 931, thereby securing the SoW VC-Lid 931to the surface of the singulated SoW package 900.

FIG. 12 illustrates an embodiment of the SoW package 1000 with the SoWpackage 900 disposed between the SoW VC-Lid 931 and the socket module1011 (with fasteners 1017 hidden for clarity of the followingdiscussion). FIG. 12 further illustrates the thermal interface material113 and the adhesive layer 1113 for thermally and physically couplingthe SoW VC-Lid 931 to the surface of the singulated SoW package 900. Asillustrated in FIG. 12 and according to some embodiments, a firstportion of the thermal interface material 113 is disposed between andthermally couples a “hot spot” (e.g., a pair of SoC dies (903A, 905A))of the singulated SoW package 900 to the SoW VC-Lid 931. Gaps 1215 areillustrated in FIG. 12 between a second pair of SoC dies (903B, 905B) ofthe singulated SoW package 900 and the SoW VC-Lid 931 and between anouter portion of the molding compound 907 and the SoW VC-Lid 931. Afirst portion of the adhesive layer 1113 is disposed between an outerportion of the molding compound 907 and the SoW VC-Lid 931. A secondportion of the adhesive layer 1113 separates the gaps 1215 and isdisposed between a third pair of SoC dies (903C, 905C) of the singulatedSoW package 900 and the SoW VC-Lid 931.

FIG. 13 is a cross-sectional view illustrating an embodiment of a SoWpackage 1300 including a SoW package 1301 disposed and thermallyconnected between a PC board (PCB) 1311 and the SoW VC-Lid 931. FIG. 13further illustrates the vapor chamber heat sink (VC-HS) 331 beingthermally coupled to the SoW VC-Lid 931 via the fourth thermal interfacematerial 213.

According to some embodiments, as illustrated in FIG. 13, the externalcontacts 807 of the SoW package 1301 are bonded to contact areas of thePCB 1311 (e.g., via a solder reflow process). In FIG. 13, the thermalinterface material 113 is disposed over and thermally couples theplurality of SoC dies (903, 905) of the singulated SoW package 1301 tothe SoW VC-Lid 931, according to some embodiments. As furtherillustrated in FIG. 13 and according to some embodiments, a portion ofan adhesive layer 1113 is disposed between outer portions of the moldingcompound 907 of the SoW package 1301 and the SoW VC-Lid 931. Accordingto some embodiments, the adhesive layer 1113 may thermally couple theportion of the surface of the singulated SoW package 1301 to the SoWVC-Lid 931.

In an embodiment, a method includes arranging a multi-die stackedsemiconductor device on a substrate; and placing a vapor chamber lidover the multi-die stacked semiconductor device with a heat input areaof a first surface of the vapor chamber lid being thermally coupled to asurface of the multi-die stacked semiconductor device. In an embodiment,the method further includes disposing a first thermal interface materialover the multi-die stacked semiconductor device and between the surfaceof the multi-die stacked semiconductor device and the heat input area ofthe first surface of the vapor chamber lid. In an embodiment, the methodfurther includes arranging a heat sink over the vapor chamber lid with acontact area of a first surface of the heat sink being thermally coupledto a heat rejection area of a second surface of the vapor chamber lid.In an embodiment, the method further includes disposing a second thermalinterface material over the vapor chamber lid and between the heatrejection area of the second surface of the vapor chamber lid and thecontact area of the first surface of the heat sink. In an embodiment,the method further includes arranging a vapor chamber heat sink over thevapor chamber lid with a contact area of a first surface of the vaporchamber heat sink being thermally coupled to a heat rejection area of asecond surface of the vapor chamber lid. In an embodiment, the methodfurther includes disposing a second thermal interface material over thevapor chamber lid and between the heat rejection area of the secondsurface of the vapor chamber lid and the contact area of the firstsurface of the vapor chamber heat sink. In an embodiment, the methodfurther including arranging a heat sink over the vapor chamber heat sinkwith a contact area of a first surface of the heat sink being thermallycoupled to a heat rejection area of a second surface of the vaporchamber heat sink; and disposing a third thermal interface material overthe vapor chamber heat sink and between the heat rejection area of thesecond surface of the vapor chamber lid and the contact area of thefirst surface of the vapor chamber heat sink.

In an embodiment, a method includes bonding a three-dimensionalintegrated circuits (3D-IC) module to a substrate; and arranging a vaporchamber heat spreader over the 3D-IC module with a heat intake area of afirst surface of the vapor chamber heat spreader being thermally coupledto a surface of the 3D-IC module. In an embodiment, the method furtherincludes arranging a vapor chamber lid (VC-Lid) over a first portion ofthe 3D-IC module. In an embodiment, the method further includesdetermining a location of a hot spot of the 3D-IC module; and placingthe VC-Lid over the first portion of the 3D-IC corresponding to thelocation of the hot spot. In an embodiment, the method further includesarranging a vapor chamber heat sink (VC-HS) over the 3D-IC module, theVC-HS including the heat intake area in a first portion of a firstsurface of the VC-HS, the VC-HS having a width that is greater than awidth of the substrate. In an embodiment, the method further includesforming a thermally conductive ring on the substrate with inner walls ofthe thermally conductive ring facing and spaced apart from outersidewalls of the 3D-IC module. In an embodiment, the method furtherincludes arranging overlying portions of the first surface of the VC-HSover the thermally conductive ring, the overlying portions facing andbeing separated from uppermost surfaces of the thermally conductive ringby a gap. In an embodiment, the 3D-IC module includes a 3D-IC processorand one or more 3D-IC memory dies. In an embodiment, the method furtherincludes bonding a conductive sheet to a second surface of the vaporchamber heat spreader, the second surface being opposite the firstsurface of the vapor chamber heat spreader.

In an embodiment, a semiconductor device includes a substrate; a threedimensional multi-die stacked package electrically coupled to thesubstrate; and a vapor chamber cap including a heat absorption area on afirst side of the vapor chamber cap and a heat expulsion area on asecond side of the vapor chamber cap opposite the first side, the heatabsorption area of the vapor chamber cap being thermally coupled to asurface of the three dimensional multi-die stacked package. In anembodiment, the semiconductor device further includes further includes aheat sink disposed over the vapor chamber cap with a contact area of afirst surface of the heat sink being thermally coupled to a heatexpulsion area of a second surface of the vapor chamber cap. In anembodiment, the semiconductor device further includes a first thermalinterface material disposed over the three dimensional multi-die stackedpackage and between the surface of the three dimensional multi-diestacked package and the heat absorption area on the first surface of thevapor chamber cap. In an embodiment, the semiconductor device furtherincludes a vapor chamber heat sink disposed over the vapor chamber capwith a contact area of a first surface of the vapor chamber heat sinkbeing thermally coupled to a heat expulsion area of a second surface ofthe vapor chamber cap. In an embodiment, the semiconductor devicefurther includes a vapor chamber heat sink disposed over the vaporchamber cap with a contact area of a first surface of the vapor chamberheat sink being thermally coupled to a heat expulsion area of a secondsurface of the vapor chamber cap.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A method comprising: arranging a multi-diesemiconductor device on a substrate; placing a vapor chamber lid overthe semiconductor device with a heat input area of a first surface ofthe vapor chamber lid being thermally coupled to a surface of themulti-die semiconductor device; and forming a thermally conductive ringon the substrate with inner walls of the thermally conductive ringfacing and spaced apart from outer sidewalls of the multi-diesemiconductor device, wherein the placing the vapor chamber lid furthercomprises arranging at least part of the vapor chamber lid over thethermally conductive ring, the overlying portions facing and beingseparated from uppermost surfaces of the thermally conductive ring by agap.
 2. The method of claim 1, further comprising disposing a firstthermal interface material over the multi-die semiconductor device priorto the placing the vapor chamber lid.
 3. The method of claim 1, furthercomprising arranging a heat sink over the vapor chamber lid with acontact area of a first surface of the heat sink being thermally coupledto a heat rejection area of a second surface of the vapor chamber lid.4. The method of claim 3, further comprising disposing a second thermalinterface material over the vapor chamber lid prior to the arranging ofthe heat sink.
 5. The method of claim 1, further comprising arranging avapor chamber heat sink over the vapor chamber lid with a contact areaof a first surface of the vapor chamber heat sink being thermallycoupled to a heat rejection area of a second surface of the vaporchamber lid.
 6. The method of claim 5, further comprising disposing asecond thermal interface material over the vapor chamber lid prior tothe arranging the vapor chamber heat sink.
 7. The method of claim 6,further comprising disposing a third thermal interface material over thevapor chamber heat sink; and arranging a heat sink over the thirdthermal interface material with a contact area of a first surface of theheat sink being thermally coupled to a heat rejection area of a secondsurface of the vapor chamber heat sink.
 8. The method of claim 1,wherein the gap is between about 0.03 mm and about 0.2 mm.
 9. A methodcomprising: bonding a three-dimensional integrated circuits (3D-IC)module to a substrate; and arranging a vapor chamber heat spreader overthe 3D-IC module with a heat intake area of a first surface of the vaporchamber heat spreader being thermally coupled to a surface of the 3D-ICmodule, wherein the arranging the vapor chamber heat spreader comprisesarranging a vapor chamber heat sink (VC-HS) over the 3D-IC module, theVC-HS including the heat intake area in a first portion of a firstsurface of the VC-HS, the VC-HS having a width that is greater than awidth of the substrate; and forming a thermally conductive ring on thesubstrate with inner walls of the thermally conductive ring facing andspaced apart from outer sidewalls of the 3D-IC module, wherein thearranging the VC-HS further comprises arranging overlying portions ofthe first surface of the VC-HS over the thermally conductive ring, theoverlying portions facing and being separated from uppermost surfaces ofthe thermally conductive ring by a gap.
 10. The method of claim 9,wherein the arranging the vapor chamber heat spreader comprisesarranging a vapor chamber lid (VC-Lid) over a first portion of the 3D-ICmodule.
 11. The method of claim 10, further comprising: determining alocation of a hot spot of the 3D-IC module; and placing the VC-Lid overthe first portion of the 3D-IC corresponding to the location of the hotspot.
 12. The method of claim 9, wherein the 3D-IC module includes a3D-IC processor and one or more 3D-IC memory dies.
 13. The method ofclaim 9, further comprising bonding a conductive sheet to a secondsurface of the vapor chamber heat spreader, the second surface beingopposite the first surface of the vapor chamber heat spreader.
 14. Themethod of claim 9, wherein the gap is between about 0.03 mm and about0.2 mm.
 15. The method of claim 14, wherein the gap is less than 0.05mm.
 16. A method of manufacturing a semiconductor device, the methodcomprising: electrically coupling a three dimensional multi-die packageto a substrate; thermally coupling a heat absorption area of a vaporchamber cap to a surface of the three dimensional multi-die package,wherein after the thermally coupling the vapor chamber cap includes theheat absorption area located along a first side of the vapor chamber capand a heat expulsion area located along a second side of the vaporchamber cap opposite the first side; placing a heat sink over the vaporchamber cap with a contact area of a first surface of the heat sinkbeing thermally coupled to the heat expulsion area of the second surfaceof the vapor chamber cap; disposing a first thermal interface materialover the three dimensional multi-die package prior to the thermallycoupling; and disposing a vapor chamber heat sink over the vapor chambercap with a contact area of a first surface of the vapor chamber heatsink being thermally coupled to the heat expulsion area of the secondsurface of the vapor chamber cap.
 17. The method of claim 16, whereinthe vapor chamber heat sink has a height of between about 1 mm and about3 mm.
 18. The method of claim 17, wherein the vapor chamber heat sinkhas a width of between about 50 mm and about 200 mm.
 19. The method ofclaim 18, wherein the gap is less than 0.05 mm.